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Thickness Measurement by Model-Based Exhaustive Analysis in Far-Infrared

Morgan Fouque 1 Nicolas Sutton-Charani 2 Olivier Strauss 1
1 ICAR - Image & Interaction
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : We propose a method for reconstructing the thickness variation of one layer of interest inside a multi-layered structure. This reconstruction is based on inverting far-infrared reflection measurements at a few distinct frequencies. This real-time method allows non-destructive evaluation of a multi-layered structure to better control its manufacturing process, whereas other methods have acquisition or computation times that are not compatible with real-time non-destructive evaluation. Two simulated data and one real data based experiments revealed that the method we propose is robust against measurement noise.
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https://hal.mines-ales.fr/hal-03203750
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Submitted on : Wednesday, April 21, 2021 - 8:48:14 AM
Last modification on : Monday, August 2, 2021 - 10:28:26 AM

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Morgan Fouque, Nicolas Sutton-Charani, Olivier Strauss. Thickness Measurement by Model-Based Exhaustive Analysis in Far-Infrared. Infrared Physics and Technology, Elsevier, 2021, 116, pp.103742. ⟨10.1016/j.infrared.2021.103742⟩. ⟨hal-03203750⟩

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