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Article Dans Une Revue Infrared Physics and Technology Année : 2021

Thickness Measurement by Model-Based Exhaustive Analysis in Far-Infrared

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Morgan Fouque
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Olivier Strauss

Résumé

We propose a method for reconstructing the thickness variation of one layer of interest inside a multi-layered structure. This reconstruction is based on inverting far-infrared reflection measurements at a few distinct frequencies. This real-time method allows non-destructive evaluation of a multi-layered structure to better control its manufacturing process, whereas other methods have acquisition or computation times that are not compatible with real-time non-destructive evaluation. Two simulated data and one real data based experiments revealed that the method we propose is robust against measurement noise.
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Dates et versions

hal-03203750 , version 1 (21-04-2021)

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Morgan Fouque, Nicolas Sutton-Charani, Olivier Strauss. Thickness Measurement by Model-Based Exhaustive Analysis in Far-Infrared. Infrared Physics and Technology, 2021, 116, pp.103742. ⟨10.1016/j.infrared.2021.103742⟩. ⟨hal-03203750⟩
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