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Comparison of different oxide growth processes by the thermal step method

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https://hal.mines-ales.fr/hal-03483653
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Submitted on : Thursday, December 16, 2021 - 4:14:37 PM
Last modification on : Saturday, December 18, 2021 - 3:17:04 AM

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  • HAL Id : hal-03483653, version 1

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F. Odiot, Isabelle Marc, O. Granier, A. Toureille. Comparison of different oxide growth processes by the thermal step method. CEIDP 2000 - International Conference on Electrical Insulation and Dielectric Phenomena, Oct 2000, Victoria, Canada. ⟨hal-03483653⟩

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