N. Azema, J. Durand, R. Berjoan, C. Dupuy, L. Cot. Oxidation stages of aluminium nitride thin films obtained by plasma-enhanced chemical vapour deposition (PECVD).
Journal of the European Ceramic Society, Elsevier, 1991, 8 (5), pp.291-298.
⟨10.1016/0955-2219(91)90123-H⟩.
⟨hal-03180772⟩